Method and apparatus for processing samples

Details Method and apparatus for processing samples Method and apparatus for processing samples

2006-11-07

2006-11-07

Warden, Jill (Department: 1743)

Chemistry: analytical and immunological testing

Automated chemical analysis

C422S091000, C422S105000, C422S105000, C422S064000, C422S065000, C436S180000

Reexamination Certificate

active

07132293

ABSTRACT:
Disclosed is apparatus for treating samples, and a method of using the apparatus. The apparatus includes processing apparatus (a) for treating the samples (e.g., plasma etching apparatus), (b) for removing residual corrosive compounds formed by the sample treatment, (c) for wet-processing of the samples and (d) for dry-processing the samples. A plurality of wet-processing treatments of a sample can be performed. The wet-processing apparatus can include a plurality of wet-processing stations. The samples can either be passed in series through the plurality of wet-processing stations, or can be passed in parallel through the wet-processing stations.

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