Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1974-03-26
1976-03-16
Borchelt, Archie R.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
178 68, H01K 3726
Patent
active
039448290
ABSTRACT:
A scanning electron microscope for displaying a scanning image utilizing a time distributed pulsed video signal. The low frequency noises in the pulsed signal are deleted according to the occurrence of sudden pulse intensity variation between adjacent video pulse signals.
REFERENCES:
patent: 3549883 (1970-12-01), Morris et al.
patent: 3614311 (1971-10-01), Fujiyasu et al.
patent: 3783281 (1974-01-01), Crewe
patent: 3829691 (1974-08-01), Hufnagel
Borchelt Archie R.
Nelms D. C.
Nihon Denshi Kabushiki Kaisha
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