Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-08-09
2005-08-09
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000
Reexamination Certificate
active
06927391
ABSTRACT:
An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.
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Japanese Office Action 2000-344226.
Fukuda Muneyuki
Kashima Hideo
Koike Hidemi
Mitsui Yasuhiro
Shichi Hiroyasu
Hitachi , Ltd.
Hughes James P.
Kenyon & Kenyon
Wells Nikita
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