Method and apparatus for preventing cross contamination of speci

Details Method and apparatus for preventing cross contamination of speci Method and apparatus for preventing cross contamination of speci

1989-07-10

1990-06-26

Hearne, Brian E.

Fishing, trapping, and vermin destroying

437 20, 437228, 437250, 148DIG83, 118 501, 118620, 118635, 250423R, 2504922, H01L 2100, H01L 1202, H01L 2142, H01L 21425

Patent

active

049372068

ABSTRACT:
A method for preventing cross-contamination of semiconductor wafers during processing comprising covering a surface portion of a support assembly with a process compatible material, engaging a semiconductor wafer with the support assembly, processing the wafer while it is engaged with the support member, and removing the process compatible material from the support assembly after said material is considered to be contaminated. A shield particularly adapted for this process includes a shield portion made from a process compatible material and a process-compatible adhesive for attaching the shield portion to the support assembly.

REFERENCES:
patent: 4397724 (1983-08-01), Moran
patent: 4578589 (1986-03-01), Aitken
patent: 4718975 (1988-01-01), Bowling et al.
patent: 4733091 (1988-03-01), Robinson et al.
patent: 4743767 (1988-05-01), Plumb et al.
patent: 4786352 (1988-11-01), Benzing
patent: 4847504 (1989-07-01), Aitken

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