Method and apparatus for pressure and mix ratio control

Details Method and apparatus for pressure and mix ratio control Method and apparatus for pressure and mix ratio control

2007-03-12

2008-10-21

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Reexamination Certificate

active

07437944

ABSTRACT:
The present invention provides apparatus and method for controlling mix ratio of gas supplied to a processing chamber integrated with chamber pressure. In one embodiment, an integrated controller is used to adjust mix ratio and chamber pressure. In one embodiment, the mix ratio and chamber pressure may be adjusted using a flow sensor and a control valve disposed in each gas supply line. In one embodiment, the flow sensor used in each gas supply line is insensitive to upstream pressure perturbations.

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PCT International Search Report amd Written Opinion dated Jul. 14, 2008 for International Application No. PCT/US2008/055015. (APPM/008848-PCT).

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