Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Patent
1998-03-03
2000-11-21
Gordon, Paul P.
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
700 46, 700 47, 700108, 700109, 700117, 700123, 438729, 324460, 324464, 20419213, 20419233, G06F 1900
Patent
active
061515329
ABSTRACT:
The invention provides a method for predicting a process surface profile that a given plasma process will create on a process substrate. The prediction is based on a test surface profile, the experimental outcome of a test process which is in general different from the plasma process of interest. In another aspect, the invention provides a technique for defining a plasma process that will produce a desired surface profile. Thus, in related aspects, the invention also provides apparatus for predicting a process surface profile and determining process values, a method of configuring a plasma reactor, a method of making semiconductor devices requiring limited empirical calibration, and a device made according to the method.
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Barone Maria E.
Gottscho Richard A.
Vahedi Vahid
Gordon Paul P.
Lam Research Corporation
Patel Ramesh
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