Material or article handling – Apparatus particularly adapted for charging or discharging a... – With means to transfer – or facilitate transfer of – vehicle...
Patent
1996-06-28
1999-05-18
MacDonald, Allen R.
Material or article handling
Apparatus particularly adapted for charging or discharging a...
With means to transfer, or facilitate transfer of, vehicle...
414217, 414783, 198394, B65G47/24
Patent
active
059058501
ABSTRACT:
A method and apparatus for positioning substrates is provided. The substrates are typically semiconductor wafers that require centering on a mounting location within a process module and orientation of a notch, flat or perimeter interruption to a known rotational position. A robot arm transfers wafers from a source to the process module. A camera is provided adjacent a path of travel of the robot arm to scan the wafers as they pass thereover. A grayscale analysis determines the centroid, or other reference point, of the wafer and the location of the notch or flat. The path of travel of the arm is altered to account for misalignment of the centroid/reference point from a known location. Data related to the rotational offset of the notch or flat relative to a known standard location is also obtained. The wafer can be rotated to position the notch or flat at a desired standard position using a rotator mounted on the robot arm or at a remote site.
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Kazimi Hani M.
Lam Research Corporation
MacDonald Allen R.
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