Method and apparatus for performing pattern defect repair...

Coherent light generators – Particular beam control device – Control of pulse characteristics

Reexamination Certificate

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C372S010000, C372S018000

Reexamination Certificate

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06879605

ABSTRACT:
A method for repairing a pattern by using a laser and a laser-based pattern repair apparatus are provided which are capable of reducing splashes, rolling-up, and damage to a glass substrate to a minimum in pattern defects repairing processing by removing a thin metal layer such as a chromium layer. A part of a string of pulses obtained by slicing, using an optical shutter, pulses from laser light having a pulse width of 10 ps to 300 ps emitted from a Q-switched mode-locked pulse laser is used to produce multi-pulses which are divided into two portions in terms of time base correction using an optical delaying unit.

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Japanese Office Action dated Jul. 23, 2002 with partial English Translation.

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