Coherent light generators – Particular beam control device – Control of pulse characteristics
Reexamination Certificate
2005-04-12
2005-04-12
Porta, David (Department: 2878)
Coherent light generators
Particular beam control device
Control of pulse characteristics
C372S010000, C372S018000
Reexamination Certificate
active
06879605
ABSTRACT:
A method for repairing a pattern by using a laser and a laser-based pattern repair apparatus are provided which are capable of reducing splashes, rolling-up, and damage to a glass substrate to a minimum in pattern defects repairing processing by removing a thin metal layer such as a chromium layer. A part of a string of pulses obtained by slicing, using an optical shutter, pulses from laser light having a pulse width of 10 ps to 300 ps emitted from a Q-switched mode-locked pulse laser is used to produce multi-pulses which are divided into two portions in terms of time base correction using an optical delaying unit.
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Japanese Office Action dated Jul. 23, 2002 with partial English Translation.
Kyusho Yukio
Morishige Yukio
Yoshino Yoichi
Dickstein Shapiro Morin & Oshinsky LLP.
Laserfront Technologies, Inc.
Monbleau Davienne
Porta David
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