Method and apparatus for performing fault detection using...

Details Method and apparatus for performing fault detection using... Method and apparatus for performing fault detection using...

2005-10-11

2005-10-11

Beausoliel, Robert (Department: 2113)

Error detection/correction and fault detection/recovery

Data processing system error or fault handling

Reliability and availability

C714S048000, C700S121000

Reexamination Certificate

active

06954883

ABSTRACT:
A method and an apparatus for performing fault detection using real-time or near real-time data from a database. A first process on at least one semiconductor wafer is performed. Data is acquired on at least one of a real-time basis and a near real-time basis, the data comprising at least one of a process state data, a tool state data, and an integrated metrology data resulting from the first processing of semiconductor wafer. The data is stored in a database. A fault detection analysis is performed based upon the data acquired from the database based upon a trigger signal that causes data to be extracted from the database on a substantially real time basis.

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