Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2008-07-15
2008-07-15
Do, Thuan (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C716S030000, C716S030000, C716S030000
Reexamination Certificate
active
11184401
ABSTRACT:
The present invention is directed to a method and apparatus for optimizing fragmentation of integrated circuit boundaries for optical proximity correction (OPC) purposes. The present invention may balance the number of vertices and the “flexibility” of the boundary and may recover fragmentation according to the process intensity profile along the ideal edge position to obtain the best decision for OPC.
REFERENCES:
patent: 7013439 (2006-03-01), Robles et al.
Aleshin Stanislav V.
Egorov Eugeni E.
Medvedeva Marina M.
Rodin Sergei B.
Do Thuan
LSI Corporation
Suiter Swantz PC LLO
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