Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2006-01-17
2006-01-17
Dinh, Paul (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000
Reexamination Certificate
active
06988260
ABSTRACT:
The present invention is directed to a method and apparatus for optimizing fragmentation of integrated circuit boundaries for optical proximity correction (OPC) purposes. The present invention may balance the number of vertices and the “flexibility” of the boundary and may recover fragmentation according to the process intensity profile along the ideal edge position to obtain the best decision for OPC.
REFERENCES:
patent: 6249904 (2001-06-01), Cobb
patent: 6269472 (2001-07-01), Garza et al.
patent: 6611953 (2003-08-01), Filseth et al.
patent: 6687895 (2004-02-01), Zhang
Aleshin Stanislav V.
Egorov Eugeni E.
Medvedeva Marina M.
Rodin Sergei B.
Dinh Paul
LSI Logic Corporation
Suiter - West - Swantz PC LLO
LandOfFree
Method and apparatus for optimizing fragmentation of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for optimizing fragmentation of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for optimizing fragmentation of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3592597