Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2005-04-14
2009-10-06
Larkin, Daniel S (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
07596990
ABSTRACT:
A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.
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Phan Nghi
Prater Craig
Su Chanmin
Boyle Fredrickson , S.C.
Larkin Daniel S
Veeco Instruments Inc.
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