Method and apparatus for monitoring the condition of a vaporizer

Gas and liquid contact apparatus – Contact devices

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118726, B01F 304

Patent

active

060989645

ABSTRACT:
In a method and apparatus for producing a vapor which serves as a chemical processing material by delivering a carrier gas and a reactive liquid to a vaporizer in which the vapor is produced, the operating state of the vaporizer is monitored by measuring the pressure of the carrier gas being delivered to the vaporizer and producing a detectable indication when the measured pressure exceeds a given value.

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