Coating processes – Direct application of electrical – magnetic – wave – or... – Electrostatic charge – field – or force utilized
Patent
1997-11-03
1999-08-03
Padgett, Marianne
Coating processes
Direct application of electrical, magnetic, wave, or...
Electrostatic charge, field, or force utilized
427485, 427 96, 4272551, 427226, 4273766, B05D 724, B05D 512, B05D 302, C23C 1600
Patent
active
059322950
ABSTRACT:
A mist generator produces a mist from a liquid precursor. The mist is charged and accelerated by a pair of charged electrodes in an acceleration chamber. The mist passes through a conduit charged to the same polarity of the mist particles, to a deposition chamber where they are deposited on a substrate having the opposite polarity as the particles. Infrared lamps heat the mist particles in the acceleration chamber to a temperature below the temperature at which the compounds and solvent in the liquid precursor decompose. In one embodiment the deposition chamber is tubular and a plurality of substrates are held within the chamber in a position substantially perpendicular to the direction of mist flow in the chamber. A heater and an electrical field generator in the tube add sufficient energy to the mist as it passes through the tube to provide uniform deposition of the mist on the plurality of substrates.
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McMillan Larry D.
Paz De Araujo Carlos A.
Padgett Marianne
Symetrix Corporation
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