Method and apparatus for minimizing agglomerate particle...

Details Method and apparatus for minimizing agglomerate particle... Method and apparatus for minimizing agglomerate particle...

2006-03-21

2006-03-21

Nguyen, Dung Van (Department: 3723)

Abrading

Abrading process

With tool treating or forming

C451S060000, C451S446000

Reexamination Certificate

active

07014539

ABSTRACT:
An apparatus and method for minimizing the size of agglomerated particles in a polishing fluid is provided. The method includes positioning a polishing pad between a sacrificial member and a support member such that the sacrificial member is in communication with the polishing pad, thereby causing the agglomerated particles to separate. The apparatus includes a polishing pad and a polishing fluid condition. The polishing fluid conditioner includes a sacrificial member and a support member, wherein the sacrificial member is in communication with the polishing pad so as to cause the agglomerated particles to separate.

REFERENCES:
patent: 6024829 (2000-02-01), Easter et al.
patent: 6077785 (2000-06-01), Andreas
patent: 6585570 (2003-07-01), Kim et al.
patent: 6769967 (2004-08-01), Southwick
patent: 6800020 (2004-10-01), Boyd et al.

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