Method and apparatus for measuring the size of a circuit or wiri

Details Method and apparatus for measuring the size of a circuit or wiri Method and apparatus for measuring the size of a circuit or wiri

1993-07-15

1995-10-17

Boudreau, Leo H.

Image analysis

Applications

Manufacturing or product inspection

348 87, 348126, 356369, 356400, 364490, 364559, G06K 900, G01J 400, H04N 718

Patent

active

054597943

ABSTRACT:
A measuring method and apparatus for automatically and accurately measuring the sizes of portions of a hybrid integrated circuit chip and circuit patterns formed thereon or a wiring board and wiring patterns formed thereon. An image of a portion of a hybrid integrated circuit chip or wiring board is obtained through a TV camera which provides image signals representing images including those of objective portions. The image signals are processed to calculate the positions of the objective portions automatically. The size of an arbitrary objective portion is determined from a difference between respective positions of other objective portions.

REFERENCES:
patent: 4866629 (1989-09-01), Chen et al.
patent: 4922308 (1990-05-01), Noguchi et al.
patent: 5050111 (1991-09-01), Ayata et al.
patent: 5127061 (1992-06-01), Amir et al.

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