Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2005-05-12
2009-08-04
Pham, Hoa Q (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
Reexamination Certificate
active
07570368
ABSTRACT:
A method for monitoring the curvature of a surface of a body such as a semiconductor wafer (22) includes directing a beam of light along an impingement axis (36) onto the surface so that a beam of light (41) is reflected from the surface at a point of impingement. The position of the reflected beam (41) is detected in two dimensions (x,y). The body (22) is moved relative to the impingement axis (41) in a direction transverse to the impingement axis and the beam-directing and position determining steps are repeated. The curvature of the surface is calculated from the detected positions of the reflected beam in a plurality of repetitions.
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Belousov Mikhail
Volf Boris
Lerner David Littenberg Krumholz & Mentlik LLP
Pham Hoa Q
Veeco Instruments Inc.
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