Method and apparatus for measuring positions on the surface of a

Details Method and apparatus for measuring positions on the surface of a Method and apparatus for measuring positions on the surface of a

1986-04-09

1988-03-15

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

356375, G01B 1130

Patent

active

047309270

ABSTRACT:
A method and apparatus for the precision measurement of positions, dimensions, etc., of a pattern or mark formed on the surface of a flat object such as a photographic mask or reticle. The amount of vertical deviation of the object with respect to a reference plane is detected at each of a plurality of measuring points and the incline of the surface of the object with respect to the reference plane at each of the measuring points is determined in accordance with the amounts of deviation and the distance between the measuring points. The coordinate positions of each of the measuring points in the reference plane are measured in accordance with the amount of movement of the object parallel to the reference plane and the coordinate positions are corrected in accordance with the corresponding incline.

REFERENCES:
patent: 3847485 (1974-11-01), Zanoni
patent: 4398824 (1983-08-01), Feldman et al.

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