Radiation gauge

Details Radiation gauge Radiation gauge

1990-06-01

1991-09-17

Fields, Carolyn E.

X-ray or gamma ray systems or devices

Specific application

Lithography

378 97, 378108, 378207, 7502521, H05G 126

Patent

active

050501968

ABSTRACT:
An X-ray aligner provided with a radiation gauge for detecting an intensity of the X-ray radiation. The sensitivity of the radiation gauge is influenced by the passed exposure, the passed non-exposure period and/or the time elapsed. The sensitivity change is compensated by the present invention. Thus, the correct exposure can be provided.

REFERENCES:
patent: 3275831 (1966-09-01), Martin
patent: 3600584 (1971-08-01), Schneble
patent: 4021675 (1977-05-01), Shifrin
patent: 4061829 (1977-12-01), Taylor
patent: 4301237 (1981-11-01), Burns
patent: 4369370 (1983-01-01), Spohr
patent: 4562586 (1985-12-01), Honda et al.

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