Method and apparatus for measuring minute displacement by subjec

Details Method and apparatus for measuring minute displacement by subjec Method and apparatus for measuring minute displacement by subjec

1991-11-07

1992-11-17

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356356, G01B 902

Patent

active

051647893

ABSTRACT:
The present invention resides in method and apparatus for measuring a minute displacement, comprising applying a light of a first wavelength at a predetermined angle to a diffraction grating formed on an object whose position is to be detected, subjecting each of the resulting diffracted light and regular reflected light and a light of a second wavelength different from the first wavelength to heterodyne interference with each other to generate a measurement signal and a reference signal, and measuring a phase difference between the measurement signal and the reference signal to thereby determine a minute displacement of the object.

REFERENCES:
patent: 4710026 (1987-12-01), Magome et al.

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