Method and apparatus for measuring heterodyne optical...

Details Method and apparatus for measuring heterodyne optical... Method and apparatus for measuring heterodyne optical...

2007-03-02

2009-11-03

Turner, Samuel A (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

C356S492000

Reexamination Certificate

active

07612888

ABSTRACT:
A method and an apparatus for measuring optical heterodyne interference in which a reference light and a measurement light differing in frequency is generated. The measurement light is S- or P-polarization light which is irradiated on a target through a polarization light beam splitter, and the reference light is P or S-polarization light which is reflected by a mirror. Interference of the measurement light from the target and the reference light reflected from the mirror is obtained by a light receiving element so as to measure a surface condition or detecting a surface detect on the target. A polarizing plate which is arranged before the light receiving element has an axis rotated so that a signal from the light receiving element becomes a minimum when the reference light is selectively shut off by a light shut off mechanism arranged before the polarization light beam splitter.

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Schmitz et al, Bench-top setup for validation of real time, digital periodic error correction, Precision Engineering, vol. 30, Jan. 2006, pp. 306-313.

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