Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2007-01-02
2007-01-02
Raevis, Robert (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
C324S724000
Reexamination Certificate
active
11133802
ABSTRACT:
The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.
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Huang Lin
Su Chanmin
Boyle Fredrickson Newholm Stein & Gratz S.C.
Raevis Robert
Veeco Instruments Inc.
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