Method and apparatus for measuring dimension of secondary electr

Details Method and apparatus for measuring dimension of secondary electr Method and apparatus for measuring dimension of secondary electr

1983-11-23

1986-01-28

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, 2502521, G01N 2300

Patent

active

045673640

ABSTRACT:
A dimension measuring apparatus for measuring the dimensions of a secondary electron emission object has a scanning electron microscope main body with a display, and a dimension measuring section connected to the main body. The dimension measuring section has a cursor setter for displaying cursors on the display. A memory stores image signals which are divided into picture elements and assigned to addresses. The image signals are used as image data. A CPU section receives the image data from the memory, obtains reference points for designating two ends of a line corresponding to a dimension of a sample to be measured based on the received image signals, and measures the dimension of the sample.

REFERENCES:
patent: 4039829 (1977-08-01), Kato et al.

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