Method and apparatus for making diamond-like carbon films

Details Method and apparatus for making diamond-like carbon films Method and apparatus for making diamond-like carbon films

2004-12-02

2008-12-02

Meeks, Timothy (Department: 1792)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C427S906000, C427S570000

Reexamination Certificate

active

07459188

ABSTRACT:
Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parameters less than 5%) large area (more than 110 cm2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.

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