Method and apparatus for maintaining topographical...

Details Method and apparatus for maintaining topographical... Method and apparatus for maintaining topographical...

2006-12-19

2006-12-19

Le, Thao P. (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S127000, C257S170000, C257S452000, C257S457000

Reexamination Certificate

active

07151302

ABSTRACT:
A semiconductor device includes a memory array having a plurality of non-volatile memory cells. Each non-volatile memory cell of the plurality of non-volatile memory cells has a gate stack. The gate stack includes a control gate and a discrete charge storage layer such as a floating gate. A dummy stack ring is formed around the memory array. An insulating layer is formed over the memory array. The dummy stack ring has a composition and height substantially the same as a composition and height of the gate stack to insure that a CMP of the insulating layer is uniform across the memory array.

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