Method and apparatus for laser process control

Details Method and apparatus for laser process control Method and apparatus for laser process control

1988-11-03

1989-09-12

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 156654, 156662, 156345, 21912161, 2191218, 21912185, H01L 21306, B23K 900, B44C 122

Patent

active

048656836

ABSTRACT:
A method and apparatus for controlling the energy of a laser beam on a workpiece includes a photodetector for generating an electrical signal which is proportional to the light reflected from the workpiece. The energy of the laser beam at the workpiece is increased from some predetermined low level until the photodetector senses an abrupt change in the reflected light. This change represents a changed state in the workpiece material that is exposed to the laser beam. The energy level at which the change takes place is used as a reference level for further laser processing.

REFERENCES:
patent: 4317981 (1982-03-01), Chubarov et al.
patent: 4398094 (1983-08-01), Hiramoto
patent: 4479848 (1984-10-01), Otsubo et al.
patent: 4780590 (1988-10-01), Griner et al.

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