Method and apparatus for ion beam transport

Details Method and apparatus for ion beam transport Method and apparatus for ion beam transport

1996-01-22

1997-11-25

Anderson, Bruce

Radiant energy

Electrically neutral molecular or atomic beam devices and...

25049221, H01J 3730, H01S 100

Patent

active

056915373

ABSTRACT:
Method and apparatus for maintaining an ion beam along a beam path from an ion source to an ion implantation station where workpieces are treated with the ion beam. A beam neutralizer is positioned upstream from the beam implantation station and injects neutralizing electrons into the ion beam. A magnetic field is created upstream from the position of the beam neutralizer for inhibiting upstream movement of neutralizing electrons. A disclosed technique for setting up the magnetic field for inhibiting electron movement is with spaced apart first and second permanent magnets.

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