Method and apparatus for inspection of optical component

Details Method and apparatus for inspection of optical component Method and apparatus for inspection of optical component

2008-05-27

2008-05-27

Lauchman, L. G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100

Reexamination Certificate

active

11319172

ABSTRACT:
An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beam24and a second light beam26both having different phases are generated from light which has passed through an optical component18, and are interfered with each other to form an interference region30. A linear line66, a linear line70and linear lines72are set within the interference region30so as to determine a distribution of light intensities on each of the linear lines72. Then, a frequency corresponding to the maximal light intensity is determined. Further, an approximated liner line or an approximated curved line is determined from a plurality of frequencies determined for each of the linear line72. Then, the aberration of the optical component is evaluated based on the coefficient of the approximated linear or curved line.

REFERENCES:
patent: 4732473 (1988-03-01), Bille et al.
patent: 5155606 (1992-10-01), Landesman
patent: 5801390 (1998-09-01), Shiraishi

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