Optics: measuring and testing – By configuration comparison – With object being compared and light beam moved relative to...
Patent
1990-02-08
1992-02-04
Rosenberger, Richard A.
Optics: measuring and testing
By configuration comparison
With object being compared and light beam moved relative to...
356240, 250223B, 72 4, G01B 1100, G01N 904, B21B 3302
Patent
active
050855158
ABSTRACT:
There is disclosed a method for inspecting a physical feature on a surface of a manufactured article. First, a sensor is provided adjacent to the article. Then, the surface of the article is sensed by the sensor while causing one of the sensor and the article to rotate about an axis perpendicular to the surface of the article, to thereby obtain a signal which has peaks corresponding to the physical feature on the surface of the article. Subsequently the signal is processed and the processed signal is analyzed based on the number of the peaks, to thereby obtain information as to the physical feature on the surface of the article. An inspection apparatus suitable for practicing the above-mentioned method is also disclosed.
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Inoue Yoshihiro
Ishizaki Hiroshi
Itoh Hajime
Itow Atsuo
Mitsubishi Metal Corporation
Pham Hoa
Rosenberger Richard A.
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