Method and apparatus for inspecting quality of manufactured arti

Optics: measuring and testing – By configuration comparison – With object being compared and light beam moved relative to...

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Details

356240, 250223B, 72 4, G01B 1100, G01N 904, B21B 3302

Patent

active

050855158

ABSTRACT:
There is disclosed a method for inspecting a physical feature on a surface of a manufactured article. First, a sensor is provided adjacent to the article. Then, the surface of the article is sensed by the sensor while causing one of the sensor and the article to rotate about an axis perpendicular to the surface of the article, to thereby obtain a signal which has peaks corresponding to the physical feature on the surface of the article. Subsequently the signal is processed and the processed signal is analyzed based on the number of the peaks, to thereby obtain information as to the physical feature on the surface of the article. An inspection apparatus suitable for practicing the above-mentioned method is also disclosed.

REFERENCES:
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patent: 4140072 (1979-02-01), Bartling et al.
patent: 4650326 (1987-03-01), Nagamine et al.
patent: 4775889 (1988-10-01), Yoshida
patent: 4831250 (1989-05-01), Fukuchi et al.
patent: 4891529 (1990-01-01), Braun et al.
patent: 4929828 (1990-05-01), Claypool

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