Method and apparatus for inspecting defects and a system for...

Details Method and apparatus for inspecting defects and a system for... Method and apparatus for inspecting defects and a system for...

2005-05-31

2008-05-13

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07372561

ABSTRACT:
The present invention relates to a high-sensitivity defect inspection method, apparatus, and system adapted for the fine-structuring of patterns; wherein, in addition to a cleaning tank which chemically cleans a sample and rinses the sample, a defect inspection apparatus having a liquid-immersion element by which the interspace between the sample and the objective lens of an optical system is filled with a liquid, and a drying tank which dries the sample, the invention uses liquid-immersion transfer means from said cleaning tank through said liquid-immersion means of said defect inspection apparatus to said drying tank so that the sample is transferred in a liquid-immersed state from said cleaning tank to said liquid-immersion means.

REFERENCES:
patent: 6571657 (2003-06-01), Olgado et al.
patent: 6935930 (2005-08-01), Fujita
patent: 7130037 (2006-10-01), Lange
patent: 2005/0052642 (2005-03-01), Shibata et al.
patent: 2000-155099 (2000-06-01), None
patent: WO 99/49504 (1999-09-01), None

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