Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2006-10-03
2006-10-03
Le, Que T. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559400
Reexamination Certificate
active
07115890
ABSTRACT:
Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
REFERENCES:
patent: 5780866 (1998-07-01), Yamamura et al.
patent: 2002/0001403 (2002-01-01), Kikuchi
patent: 2001134760 (2001-05-01), None
Search Report, “International Searching Authority”, PCT/US2004/020874, (Nov. 3, 2004).
Amar Gal
Eynat Ronen
Guetta Avishay
Schwartz Gilad
Shoham Doron
Applied Materials Inc.
Fahmi Tarek N.
Le Que T.
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