Method and apparatus for inspecting a pattern

Details Method and apparatus for inspecting a pattern Method and apparatus for inspecting a pattern

1982-08-20

1985-07-02

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356376, G01N 2186

Patent

active

045270708

ABSTRACT:
In a method for inspecting a pattern produced by using pattern data of a predetermined reference pattern, comparison is carried out between the pattern reproduced from the scanning signal of the pattern and the pattern produced from the signal of a modified form of the predetermined reference pattern.

REFERENCES:
patent: 4318081 (1982-03-01), Yoshida
patent: 4390955 (1983-06-01), Arimura
patent: 4414566 (1983-11-01), Peyton et al.
patent: 4445137 (1984-04-01), Panofsky

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