Method and apparatus for inline measurement of material...

Details Method and apparatus for inline measurement of material... Method and apparatus for inline measurement of material...

2006-03-21

2006-03-21

Hail, III, Joseph J. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S005000, C451S006000, C451S285000

Reexamination Certificate

active

07014531

ABSTRACT:
Apparatus for inline measurement of material removal during a polishing or grinding process including:a. a substantially circular rotatable grinding or polishing pad; andb. a sample holder; andc. a sample with a top, a bottom and one or more side surfaces;the sample holder being arranged to hold the bottom surface of the sample in contact with the pad and the sample holder being connected to a moving device to move the sample to a position at least partially over the rim of the pad, during at least a part of the process, the apparatus also including a detecting device for sampling the distances between a reference mark and a target area in the sample and a plane defined by the bottom surface of the sample during the process.

REFERENCES:
patent: 5741171 (1998-04-01), Sarfaty
patent: 5816899 (1998-10-01), Hart et al.
patent: 5948203 (1999-09-01), Wang
patent: 5964643 (1999-10-01), Birang et al.
patent: 6071177 (2000-06-01), Lin et al.
patent: 6095905 (2000-08-01), Jameson
patent: 6208425 (2001-03-01), Sandhu et al.
patent: 6213844 (2001-04-01), Lenkersdorfer
patent: 6273792 (2001-08-01), Meloni
patent: 6439979 (2002-08-01), Beppu et al.
patent: 6524165 (2003-02-01), Wiswesser et al.
patent: 6707540 (2004-03-01), Lehman et al.
patent: 2001/0023167 (2001-09-01), Kimura et al.
patent: 9619318 (1996-06-01), None

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