Thermal measuring and testing – Thermal calibration system – By thermal radiation emitting device
Patent
1996-03-28
1998-06-09
Gutierrez, Diego F. F.
Thermal measuring and testing
Thermal calibration system
By thermal radiation emitting device
G01K 1500
Patent
active
057624194
ABSTRACT:
A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source and a filter to simulate a blackbody of a known temperature. An alignment tool aligns a light-emitting surface of the calibration instrument to the input of the temperature probe. The calibration instrument may include a fiber optic bundle to transmit light from the light source to the light emitting surface.
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Applied Materials Inc.
Gutierrez Diego F. F.
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