Thermal measuring and testing – Thermal calibration system – By thermal radiation emitting device
Patent
1998-01-15
2000-05-02
Gibson, Randy W.
Thermal measuring and testing
Thermal calibration system
By thermal radiation emitting device
374131, 374141, 2502521, G01K 1500
Patent
active
060564334
ABSTRACT:
A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source and a filter to simulate a blackbody of a known temperature. An alignment tool aligns a light-emitting surface of the calibration instrument to the input of the temperature probe. The calibration instrument may include a fiber optic bundle to transmit light from the light source to the light emitting surface.
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Applied Materials Inc.
Gibson Randy W.
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