Thermal measuring and testing – Thermal calibration system – By thermal radiation emitting device
Patent
1995-07-26
1998-10-13
Gutierrez, Diego F.F.
Thermal measuring and testing
Thermal calibration system
By thermal radiation emitting device
374131, 374141, 2502521, G01K 1500
Patent
active
058202617
ABSTRACT:
A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source, such as a light emitting diode, to simulate a blackbody of a known temperature. The light source is located inside a chamber and emits light through an aperture. The calibration instrument may be inserted into a thermal processing chamber, or the temperature probe may be removed from the chamber. An alignment tool aligns the aperture to the input of the temperature probe. The calibration instrument may be integrated with the alignment tool, or it may be removable.
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Patent Abstracts of Japan, vol. 11, No. 201 (P-590), JP 62022036, published Jan. 30, 1987.
Applied Materials Inc.
Gutierrez Diego F.F.
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