Method and apparatus for improving a temperature controlled...

Details Method and apparatus for improving a temperature controlled... Method and apparatus for improving a temperature controlled...

2005-04-12

2005-04-12

Lund, Jeffrie R. (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

For liquid etchant

C156S345150, C156S345210, C118S666000, C118S688000

Reexamination Certificate

active

06878232

ABSTRACT:
A method and apparatus for improving an operating efficiency for a process including temperature dependent fluid delivery including determining a projected time period to start a process during a non-operating time period; delivering a process fluid for performing the process along at least one fluid recirculation pathway for at least one selected time period the at least one fluid recirculation pathway including a substantial portion of a fluid delivery pathway for providing the process fluid to the process at a predetermined process temperature; and, providing the process fluid following the at least one selected time period to the process at the predetermined process temperature.

REFERENCES:
patent: 5500081 (1996-03-01), Bergman
patent: 5791970 (1998-08-01), Yueh
patent: 6200414 (2001-03-01), Hwang et al.
patent: 6207068 (2001-03-01), Glick et al.

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