Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1990-08-20
1993-07-13
Arnold, Bruce Y.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250306, 378 43, G01N 2322, G21K 700
Patent
active
052276309
ABSTRACT:
A method and apparatus for imaging of an atomic environment are disclosed. The method includes detecting and measuring the intensity of a diffuse low energy electron diffraction pattern. The diffraction pattern may be formed by directing a beam of electrons against the surface of a sample, or by directing a beam of X-rays against the surface of a sample. The diffraction pattern may be energy-filtered to obtain a diffraction pattern corresponding to the lower energy electrons emitted by the surface. Data corresponding to reconstructed amplitudes of a waveform is generated by operating on the intensity data. The data corresponding to the reconstructed amplitude is capable of being displayed as a variety of slices or two-dimensional planes of the three-dimensional image of an atomic environment, and is capable of being displayed holographically.
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Harp Gerald R.
Saldin Dilano K.
Tonner Brian P.
Arnold Bruce Y.
Board of Regents of the University of Wisconsin System
Parsons David R.
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