Method and apparatus for imaging dislocations in materials using

Details Method and apparatus for imaging dislocations in materials using Method and apparatus for imaging dislocations in materials using

1992-05-07

1993-10-26

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 250397, H01V 3728

Patent

active

052568776

ABSTRACT:
Apparatus for imaging dislocations in materials using a scanning electron microscope and in which an electron detector is placed very close to the specimen being examined, without the intervention of a retarding field filter; low-loss electrons are collected by ensuring that the detector accepts electrons received from the specimen at an obtuse angle with respect to the incident electron beam; and an image enhancement system is used.

REFERENCES:
patent: 2281325 (1942-03-01), Ramo
patent: 4238686 (1980-09-01), Chin et al.
patent: 4665513 (1987-10-01), Wells
patent: 4724320 (1988-07-01), Ino et al.
patent: 5093573 (1992-03-01), Mikoshiba et al.
patent: 5198675 (1993-03-01), Hikita et al.

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