Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Patent
1996-07-02
1998-11-24
Phan, James
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
359204, G02B 2608
Patent
active
058415670
ABSTRACT:
An imaging system for imaging a substrate surface at several imaging wavelengths comprises a replaceable beam generating module, a spinning mirror and a controller. The beam generating module generates an imaging beam in dependence on beam command signals. The imaging beam has a wavelength which is a one of the plurality of imaging wavelengths. The beam generating module further presents the imaging beam along a prescribed path, and the beam generating module generates wavelength signals indicative of the imaging beam wavelength. The controller receives the wavelength signals, and generates the beam command signals in dependence on the wavelength signals. The beam command signals control generation of the imaging beam in accordance with a prescribed pattern to image upon the substrate surface.
REFERENCES:
patent: 3272568 (1966-09-01), Koorneef et al.
patent: 3816659 (1974-06-01), Landsman
patent: 3857031 (1974-12-01), Sinclair et al.
patent: 3894276 (1975-07-01), Janssen
patent: 3938191 (1976-02-01), Jarmy
patent: 4012676 (1977-03-01), Giebler
patent: 4028732 (1977-06-01), Salter et al.
patent: 4131916 (1978-12-01), Landsman
patent: 4186991 (1980-02-01), Koide et al.
patent: 4209239 (1980-06-01), Wood et al.
patent: 4387452 (1983-06-01), Bricot et al.
patent: 4390235 (1983-06-01), Minoura
patent: 4402061 (1983-08-01), Hazet et al.
patent: 4409624 (1983-10-01), Kingsley
patent: 4413863 (1983-11-01), Lombard
patent: 4415911 (1983-11-01), Tazaki
patent: 4417330 (1983-11-01), Hazel et al.
patent: 4432082 (1984-02-01), Hsieh et al.
patent: 4432083 (1984-02-01), Hsieh et al.
patent: 4435797 (1984-03-01), Hsieh et al.
patent: 4443870 (1984-04-01), Hazel et al.
patent: 4445798 (1984-05-01), Munehiro
patent: 4455910 (1984-06-01), Kraft et al.
patent: 4476496 (1984-10-01), Thaler
patent: 4489406 (1984-12-01), Hsieh et al.
patent: 4494226 (1985-01-01), Hazel et al.
patent: 4543615 (1985-09-01), Van Campenhout et al.
patent: 4585331 (1986-04-01), Stoffel et al.
patent: 4631432 (1986-12-01), Thaler
patent: 4637679 (1987-01-01), Funato
patent: 4662708 (1987-05-01), Bagdal
patent: 4666315 (1987-05-01), Scranton
patent: 4684228 (1987-08-01), Holthusen
patent: 4704712 (1987-11-01), Siryj
patent: 4798478 (1989-01-01), Crystal
patent: 4834353 (1989-05-01), Chitayat
patent: 4985651 (1991-01-01), Chitayat
patent: 5089908 (1992-02-01), Jodoin et al.
patent: 5098203 (1992-03-01), Henderson
patent: 5157533 (1992-10-01), Hanamoto
patent: 5181137 (1993-01-01), Koide
patent: 5225924 (1993-07-01), Ogawa et al.
patent: 5228358 (1993-07-01), Sakino et al.
patent: 5309274 (1994-05-01), Akanabe
patent: 5325381 (1994-06-01), Paoli
patent: 5361158 (1994-11-01), Tang
patent: 5387995 (1995-02-01), Harig
"Linear Motor Applications" by Boaz Eidelberg, Anorad Corp., Oct. 1992, 4 sheets.
"Air Bearings, Technology & Applications" by Robert Kody, Dover Instrument Corporation, Nov./Dec. 1992 3 sheets.
"The Amateur Scientist" by Shawn Carlson, Scientific American, Aug. 1996, pp. 96, 98-99.
Squires David P.
Wheeler Joseph A.
Barco Gerber Systems
Phan James
LandOfFree
Method and apparatus for imaging at a plurality of wavelengths does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for imaging at a plurality of wavelengths, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for imaging at a plurality of wavelengths will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1709535