Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1986-12-15
1989-04-11
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 250310, 250311, G01N 2300, G01R 3126
Patent
active
048209775
ABSTRACT:
A method for function checking microelectronic components inside LSI circuits, particularly during the development phase, provides localization and imaging of regions of a specimen which carry defined signals that depend on the operating status of the cirucit. For localizing the points carrying the defined electrical signals, a primary beam reads the signal at the measuring point and a secondary signal derived therefrom is compared in a detector arrangement to the anticipated or sought-after signal by a correlation method. For the correlation, the intensity of the primary beam or the current of the secondary particles are modulated alternately with the sought-after or anticipated signal and, respectively, with the negation of the sought-after or anticipated signal and the measured secondary signal is integrated. Part of the integrated secondary signal changes with the frequency prescribed by the signal change, which is filtered out and supplied to an evalutor circuit which controls the intensity of a display, such as a picture screen.
REFERENCES:
patent: 4220853 (1980-09-01), Feuerbaum et al.
patent: 4223220 (1980-09-01), Feuerbaum
patent: 4277679 (1981-07-01), Feuerbaum
patent: 4286154 (1981-08-01), Okubo et al.
patent: 4292519 (1981-09-01), Feuerbaum
patent: 4413181 (1983-11-01), Feuerbaum
patent: 4486660 (1984-12-01), Feuerbaum
patent: 4581534 (1986-04-01), Todokoro et al.
patent: 4581578 (1986-04-01), Honma et al.
patent: 4605860 (1986-08-01), Fukuhara et al.
patent: 4675602 (1987-06-01), Feuerbaum et al.
patent: 4686466 (1987-08-01), Feuerbaum et al.
patent: 4689555 (1987-08-01), Brust et al.
patent: 4745362 (1988-05-01), Brust
Goldstein et al., "Practical Scanning Electron Microscopy", Plenum Pren, New York, 1975, pp. 95-99 and 110-116.
Brust et al., "Frequency Tracing and Mapping: Novel Electron . . .", Proc. of Microcircuit Eng. Conf., Berlin, (9/1984), pp. 411-425.
Eisenzopf Reinhard J.
Nguyen Vinh P.
Siemens Aktiengesellschaft
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