Method and apparatus for identifying defects in a substrate...

Details Method and apparatus for identifying defects in a substrate... Method and apparatus for identifying defects in a substrate...

2007-06-05

2007-06-05

Mancuso, Joseph (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S299000, C356S237100

Reexamination Certificate

active

10379236

ABSTRACT:
A surface inspection apparatus in accordance with the principles of the invention includes an optical system having a plurality of time delay integration (TDI) sensors. The plurality of TDI sensors are arranged to generate a plurality of images of an object so that the images are offset a sub-pixel distance from each other. A scanning element enables the TDI sensors to scan the object so successive images of the object can be generated. Image processing circuitry is used to process the plurality of successive images together to produce a reconstructed image of the object having increased pixel density. The embodiments of the invention also include methods for generating reconstructed images from a plurality of TDI images obtained from at least two offset TDI sensors.

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