4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With detector

Daniel L. Cavan

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Inspection system for array of microcircuit dies having redundan

Radiant energy – Photocells; circuits and apparatus – Interference pattern analysis
Patent

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Inspection system for array of microcircuit dies having redundan

Radiant energy – Photocells; circuits and apparatus – Interference pattern analysis
Patent

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Method and apparatus for detecting defect information in a holog

Image analysis – Histogram processing – For setting a threshold
Patent

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Method and apparatus for identifying defects in a substrate...

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Proximity effect correction method through uniform removal...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate

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