Method and apparatus for identification of crystallographic defe

Details Method and apparatus for identification of crystallographic defe Method and apparatus for identification of crystallographic defe

1995-01-18

1995-11-14

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, G01N 23203

Patent

active

054669340

ABSTRACT:
An imaging apparatus (10) includes a scanning electron microscope (12) which is controlled to bombard numerous points (62) of a material sample (24) with an electron beam (18). Backscatter diffraction patterns are collected by an image collection system (26) which may include both a slower responding video camera (32) and a faster responding diode array (40). For a baseline point (62), an electron backscatter diffraction pattern collected at the video camera (32) is analyzed to identify representative pixels which reside along Kikuchi bands (78). Backscatter images from subsequent points (62) are rapidly compared (98) with the baseline to detect changes. When changes are not detected, EBSPs are not analyzed. When changes are detected, EBSPs are analyzed to generate new baselines. The resulting collection of analyzed EBSPs are processed (104) to identify microstructure attributes and to characterize defects (64).

REFERENCES:
patent: 4952804 (1990-08-01), Nakagawa et al.
patent: 4990779 (1991-02-01), Yoshitomi et al.
Etingof and Adams; Jun. 6, 1992; Representations of Polycrystalline Microstructure by n-Point Correlation Tensors.
Wright; 1993; A Review of Automated Orientation Imaging Microscopy (OIM).sup.1.
Adams, Wright and Kunze; Apr. 1993; Orientation Imaging: The Emergence of a New Microscopy.
Brent L. Adams; 1993; Orientation Imaging Microscopy: Application to the Measurement of Grain Boundary Structure.

Affiliated with

Also associated with

Rating

Method and apparatus for identification of crystallographic defe does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for identification of crystallographic defe, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for identification of crystallographic defe will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1222948