Method and apparatus for high-speed inspection and review

Details Method and apparatus for high-speed inspection and review Method and apparatus for high-speed inspection and review

2005-01-11

2005-01-11

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S305000, C250S310000, C250S492200, C356S237100

Reexamination Certificate

active

06841776

ABSTRACT:
One embodiment disclosed relates to an apparatus for substrate inspection and review. The apparatus includes at least a first subsystem, a processor, and a second subsystem. The first subsystem is used for inspecting said substrate. The processor is utilized for identifying regions of said substrate for review. The second subsystem is used for reviewing at least a portion of said identified regions.

REFERENCES:
patent: 5578821 (1996-11-01), Meisberger et al.
patent: 6388747 (2002-05-01), Nara et al.
patent: 6407373 (2002-06-01), Dotan
patent: 6610980 (2003-08-01), Veneklasen et al.
Veneklasen, Lee H., “The continuing development of low-energy electron microscopy for characterizing surfaces”, Rev. Sci. Instrum, Dec. 1992, pp. 5513-5532, vol. 63, No. 12, American Institute of Physics.

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