Method and apparatus for growing films on a substrate

Details Method and apparatus for growing films on a substrate Method and apparatus for growing films on a substrate

1988-03-29

1990-08-07

Stoll, Robert L.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156606, 156610, 156611, 156DIG70, 156DIG83, C30B 2306

Patent

active

049465430

ABSTRACT:
A method and apparatus for growing films on a plurality of substrates is disclosed. The apparatus includes a substrate rack for securing a plurality of substrates on a predetermined position. An ampoule is also provided which environmentally isolates the substrates. The ampoule includes first and second reservoirs for storing source material at opposite ends of ends of the ampoule.

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