Method and apparatus for gross leak detection

Measuring and testing – With fluid pressure – Leakage

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G01M 320

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047350849

ABSTRACT:
A helium mass spectrometer leak detector includes a spectrometer tube connected to the inlet of a high vacuum pump. Helium tracer gas passes in reverse direction through the high vacuum pump from the foreline to the spectrometer tube. Relatively high pressure gross leak tests are performed, while maintaining the foreline of the high vacuum pump at the required operating pressure of about 100 millitorr, by passing the tracer gas in reverse direction through one or two stages of a mechanical vacuum pump. Test port pressures up to about atmosphere can be accommodated, with only a single mechanical vacuum pump required. According to another feature, high test port pressures are accommodated using a variable flow restrictor and reverse-connected mechanical vacuum pump in combination.

REFERENCES:
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patent: 3520176 (1970-07-01), Becker
patent: 3616680 (1971-11-01), Schrader
patent: 3626760 (1971-12-01), Briggs et al.
patent: 3690151 (1972-09-01), Briggs
patent: 4204815 (1980-05-01), Le Blanc
patent: 4294106 (1981-10-01), Gevaud et al.
patent: 4472962 (1984-09-01), Mennenga
patent: 4499752 (1985-02-01), Fruzzetti et al.
Worthington, "New Developments in Trapless Leak Detection," Vacuum Technology Research/Development, Nov. 1976.
Introduction to Helium Mass Spectrometer Leak Detection, Varian Associates, Inc., 1980, pp. 26-45.
"New Dimensions in Leak Detection," Varian Brochure, Dec. 1982.

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