Method and apparatus for generating electron channeling patterns

Details Method and apparatus for generating electron channeling patterns Method and apparatus for generating electron channeling patterns

1990-07-17

1991-05-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3726, G01N 23225

Patent

active

050139142

ABSTRACT:
An apparatus and a method of obtaining respective electron channeling patterns from a plurality of grains on a sample are disclosed. The sample is scanned by, for example, an electron beam two-dimensionally to specify positions of each of the grains and the positions are compared with an irradiation position of the collimated electron beam for the electron channeling pattern. The sample is moved to cause the positions of each of the grains to coincide with the irradiation position of the collimated electron beam.

REFERENCES:
Schulson et al., J. Material Sci., 6, 1971, pp. 47-55.
Schulson et al., Journal of Scientific Instruments (Jrnl of Physis E) 1969, Series 2, vol. 2, pp. 247-251.
van Essen et al., Journal of Materials Science 4 (1969), pp. 336-339.

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