Fluid sprinkling – spraying – and diffusing – Distributor continuously moves relative to support during...
Reexamination Certificate
2006-10-31
2006-10-31
Nguyen, Dinh Q. (Department: 3752)
Fluid sprinkling, spraying, and diffusing
Distributor continuously moves relative to support during...
C239S222000, C239S504000, C239S548000, C134S144000, C134S902000
Reexamination Certificate
active
07128279
ABSTRACT:
A fluid delivery device for delivering fluid to the backside of a substrate while minimizing waste is provided. The device includes an inner cylindrical tube having a top opening and a bottom opening. An upper cap overlying a top portion of the inner cylindrical tube is included. The upper cap is moveably disposed over the inner cylindrical tube. The upper cap includes a top with at least one hole defined therein. The top includes a sidewall extending therefrom. A system and a method for reducing an amount of a cleaning chemistry applied to a backside of a wafer during a cleaning operation are also provided.
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Boyd John M.
Woods Carl
Gorman Darren
Lam Research Corporation
Martine & Penilla & Gencarella LLP
Nguyen Dinh Q.
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