Method and apparatus for fine movement of specimen stage of elec

Details Method and apparatus for fine movement of specimen stage of elec Method and apparatus for fine movement of specimen stage of elec

1989-12-26

1991-04-30

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

2504421, H01J 3726

Patent

active

050120921

ABSTRACT:
Method and apparatus for fine movement of a specimen stage of an electron microscope wherein a value of enlargement magnification M of the electron microscope is set, a manipulation unit adapted to move an image enlarged by the electron microscope in X or Y direction is then manipulated; a pulse signal PX2 or PY2 which accords with a manipulation amount of the manipulation unit is delivered, the specimen stage is moved in the X or Y direction in accordance with the delivered pulse signal, a pulse signal PX1 and PY1 which accords with a moving distance of the specimen stage in the X or Y direction is delivered, and the operation of movement of the specimen stage is stopped when the relation represented by PX2.multidot.K/M=PX1 or the relation represented by PY2.multidot.K/M=PY1 stands, where K is a constant.

REFERENCES:
patent: 4233510 (1980-11-01), Sato
patent: 4393309 (1983-07-01), Norioka
patent: 4687931 (1987-08-01), Fukuhara et al.
patent: 4724319 (1988-02-01), Shirota
patent: 4857742 (1989-08-01), Kato et al.

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